High-frequency ferromagnetic properties of uniaxial anisotropy as-deposited FeCoZr films

摘要

Nanocrystalline FeCoZr films with Zr composition gradient were prepared by gradient sputtering (GS) method at room temperature. A uniaxial magnetic anisotropy (UMA) with high Hk up to 305 Oe was achieved by controlling the composition gradient of doping element Zr. The origin of UMA can be attributed to the uniaxial stress gradient, which is resulted from the composition gradient. It is interesting to note that as-deposited GS films without magnetic annealing exhibited promising high-frequency ferromagnetic properties with resonance frequency over 3 GHz. This room-temperature fabrication process resolves a critical issue, I.e. To obtain a high resonance ferromagnetic film material under a compatible technology between ferromagnetic film preparation and monolithic integrated circuits (MICs) techniques.