Effects of Adsorbate Surface Diffusion in Focused-Electron-Beam-Induced-Deposition

摘要

The time-dependent continuum model is applied to simulate a growth of structures with a non-rotational symmetry. The surface diffusion of adsorbates, depending on the beam parameters and the deposit size, may lead to the different growth rate along the deposited structures. Here, a few conventional patterning strategies have been studied: spiral inwards, spiral outwards and zigzag.