Nanodiamond microelectrode array with mesa structure fabricated for bio-analytical applications

摘要

Ultra-microelectrode arrays (UMEAs) are widely used because of advantages such as low capacitance and low iR losses, which provides a high signaloise ratio and allows use in highly resistive media. They also can be used in applications requiring high temporal and spatial resolution. Hemispherical diffusion enhances the flux density at the microelectrode surface to provide greater sensitivity than macroelectrodes. Catecholamine neurotransmitters, such as dopamine, play important roles in the mammalian central nervous system and require constant monitoring and measurement. A nitrogen incorporated nanodiamond UMEA was fabricated using silicon microfabrication technology and microwave PECVD process by using a 'top-down' approach. This process allows greater control over the UMEA dimensions and nanodiamond microstructure. The array consists of 2500 UME 'mesas' projecting above the surrounding insulating matrix of spin-on-dielectric. Cyclic voltammetry was used to characterize the UMEA for detection of dopamine.