Abstract: We have developed methods for embedding miniature planar IR sensor elements flush at the surface of rigid substrates. The planar Ge waveguides have thicknesses down to approximately 10 micron, and widths of 0.5-1 mm. These waveguides are tapered in thickness along their 50-mm lengths to permit efficient coupling of light into the approximately 10 micron sensing region without requiring an IR microscope. The waveguides can therefore be positioned with their sensor surface horizontal. Such waveguides can be used as mid-IR evanescent-wave sensor elements for small biological samples. They display exquisite sensitivity to small numbers of analyte molecules at their surface. It is possible to collect high-throughput broadband spectra, e.g. of tiny liquid droplets or membranes of individual cells, in a matter of seconds. !6
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