RESPONSE NEAR TWICE THE NATURAL FREQUENCY OF ELECTROSTATICALLY ACTUATEDMICRORESONATORS

摘要

This paper deals with electrostatically actuated micro resonators response near twice natural frequency. Both the electrostatic force (including fringe effect) and the Casimir force are included in the model. They introduce parametric nonlinear terms in the system. The partial-differential equation of motion of the system is solved by using the method of multiple scales. A direct approach of the problem is then used. Two approximation problems resulting from the direct approach are solved. The phase-amplitude relationship is obtained. Numerical results for uniform electrostatically actuated micro resonator sensors are provided.