MEMS-BASED GYROSCOPE: DESIGN, ANALYSIS AND SIMULATION

摘要

This paper introduces an efficient design for a symmetrical and decoupled micromachined gyroscope. The angular rate resolution of the gyroscope is increased by matching the resonance frequencies of the drive and sense modes close to each other using symmetric suspensions; whereas, the undesired mechanical coupling between the two modes during matched mode operation is reduced by the fully decoupled gyroscope flexures. Reduced mechanical coupling results in a stable zero-rate output, providing excellent bias stability. The design utilizes efficiently the silicon area, increases the driving electrostatic force, and increases the sensing capacitance.