A Step-by-Step FDC Modeling Approach applied toHDP CVD deposition process

摘要

Once FDC software is install in the fab environment, the real work starts forrnprocess and equipment engineers in order to create models that accurately describe givenrnprocess or equipment and allow fine tuned fault detection and classification. ROI isrnstrongly dependent on how much efforts are required to obtain results and $$$ value ofrnthe last, of course. Since different approaches have been used to perform modeling, thernquality of modeling work varies in a great extent from engineer to engineer. Largernnumber of available (but not always relevant) variables one can include into model leadsrnto overburdening of already complex correlation calculations and thus decreasingrnaccuracy and signature stability. Consequently, a routine needs to be established andrnstandardized in order to minimize the variation of a quality in modeling work byrnproviding user with a guidance (step by step walk through) and example (basic workingrnmodel).