School of Physics, University College Dublin, Belfield, Dublin, Ireland 4;
Research Institute of Science and Engineering, Waseda University, 3-4.1, Okubo, Shinjuku-ku,Tokyo, Japan 169-0072;
Department of Advanced Interdisciplinary Sciences, Utsunomiya University,Yoto 7-1-2, Utsunomiya, Tochigi, Japan 321-8585;
School of Physics, University College Dublin, Belfield, Dublin, Ireland 4;
School of Physics, University College Dublin, Belfield, Dublin, Ireland 4;
School of Physics, University College Dublin, Belfield, Dublin, Ireland 4;
School of Physics, University College Dublin, Belfield, Dublin, Ireland 4;
Department of Electrical Engineering, Nagaoka University of Technology, Kami-tomiokamachi 1603.1, Nagaoka, Niigata, Japan 940-2188;
Department of Advanced Interdisciplinary Sciences, Utsunomiya University,Yoto 7-1-2, Utsunomiya, Tochigi, Japan 321-8585 ,Center for Optical Research Education (CORE), Utsunomiya University,Yoto 7-1-2, Utsunomiya, Tochigi, Japan 321-8585,Japan Science and Technology Agency, CREST,4-1-8 Honcho, Kanagawa, Saitama, Japan 332-0012;
Department of Advanced Interdisciplinary Sciences, Utsunomiya University,Yoto 7-1-2, Utsunomiya, Tochigi, Japan 321-8585 ,Center for Optical Research Education (CORE), Utsunomiya University,Yoto 7-1-2, Utsunomiya, Tochigi, Japan 321-8585,Japan Science and Technology Agency, CREST,4-1-8 Honcho, Kanagawa, Saitama, Japan 332-0012;
School of Physics, University College Dublin, Belfield, Dublin, Ireland 4;
School of Physics, University College Dublin, Belfield, Dublin, Ireland 4;
extreme ultraviolet; water window; unresolved transition array (UTA); rare-earth; LPP;
机译:高能短波(438 nm)激光辐射产生的等离子体的离子发射特性
机译:根据激光波长优化13.5 nm激光产生的锡等离子体的发射
机译:SN激光产生的等离子体的短波长波长带外EUV排放
机译:激光产生的3-7nm光谱区中的等离子体UTA发射
机译:研究激光产生的等离子体产生的极紫外线,作为下一代光刻的来源。
机译:氮化硼激光产生等离子体的水窗线发射的激发波长依赖性
机译:激光产生的等离子体UTA发射的比例缩小至3 nm,用于下一代光刻和短波长成像
机译:激光产生的氧等离子体中的短波红外线发射