首页> 外文会议>Active and Adaptive Optical Components >Final surface error correction of an off-axis aspheric petal by ion figuring
【24h】

Final surface error correction of an off-axis aspheric petal by ion figuring

机译:通过离轴法校正离轴非球面花瓣的最终表面误差

获取原文
获取原文并翻译 | 示例

摘要

Abstract: The final surface figure error correction of a 1.3 m ULE$+TM$/ frit-bonded, ultra- lightweight, off-axis primary mirror petal was successfully completed using the ion figuring process. The petal was a concave aspheric optical element. Ion figuring is an optical fabrication method that provides highly controlled error correction of previously polished surfaces using a directed, inert and neutralized ion beam to physically sputter material from the optic surface. The surface figure error of the petal following conventional polishing was 5.02 $lambda p-v, 0.62 $lambda rms, and was improved to 0.17 $lambda p-v, 0.015 $lambda rms in four process (test-ion figure) iterations ($lambda $EQ 632.8 nm). A multi-iteration process sequence was selected to address the various surface figure error volume and spatial frequency components and involved applying three different beam removal functions. The benefits of ion figuring a complex shaped optic using multiple figuring-testing iterations were clearly demonstrated. !5
机译:摘要:使用离子刻蚀工艺成功完成了1.3 m ULE $ + TM $ /熔结超轻离轴主镜花瓣的最终表面图形误差校正。花瓣是凹的非球面光学元件。离子刻蚀是一种光学制造方法,它使用定向,惰性和中和的离子束对光学表面进行物理溅射,从而对先前抛光的表面提供高度可控的误差校正。常规抛光后花瓣的表面图形误差为5.02 $λv,0.62 $λrms,在四个过程中(测试离子图)迭代($ lambda $ EQ 632.8)提高至0.17 $λpv,0.015 $λrms纳米)。选择了多次迭代处理序列以解决各种表面图形误差量和空间频率分量,并涉及应用三种不同的光束去除功能。使用多次图形测试迭代进行离子图形处理复杂形状的光学器件的好处已得到明显证明。 !5

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号