CEMS Investigations of Fe-Silicide Phases Formed by the Method of Concentration Controlled Phase Selection

摘要

Conversion electron Moessbauer spectroscopy (CEMS) measurements have been made on Fe-silcide samples formed using the method of concentration controlled phase selection. To prepare the samples a 10 nm layer of Fe_(30)M_(70) (M = Cr, Ni) was evaporated onto Si(100) surfaces, followed by evaporation of a 60 nm Fe layer. Diffusion of the Fe into the Si substrate and the formation of different Fe―Si phases was achieved by subjecting the evaporated samples to a series of heating stages, which consisted of (a) a 10 min anneal at 800℃ plus etch of the residual surface layer, (b) a further 3 hr anneal at 800℃, (c) a 60 mJ excimer laser anneal to an energy density of 0.8 J/cm~2 , and (d) a final 3 hr anneal at 800℃. CEMS measurements were used to track the Fe-silicide phases formed. The CEMS spectra consisted of doublets which, based on established hyperfine parameters, could be assigned to α- or β-FeSi_2 or cubic FeSi. The spectra showed that β-FeSi_2 had formed already at the first annealing stage. Excimer laser annealing resulted in the formation of a phase with hyperfine parameters consistent with those of α-FeSi_2. A further 3 hr anneal at 800℃ resulted in complete reversal to the semiconducting β-FeSi_2 phase.