Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL, USA;
School of Information and Electronics, Beijing Institute of Technology, Beijing, China;
Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL, USA;
MEMS Engineering and Materials Inc., Sunnyvale, CA, USA;
School of Information and Electronics, Beijing Institute of Technology, Beijing, China;
Departmen of Medical Engineering, University of South Florida, Tampa, FL, USA;
Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL, USA;
Micromechanical devices; Ceramics; Electrodes; Fabrication; Acoustics; Actuators; Gold;
机译:基于薄陶瓷PZT的高分压电MEMS扬声器
机译:具有聚酰亚胺膜和薄膜Pb(Zr,Ti)O3(PZT)驱动器的压电驱动MEMS扬声器
机译:提出了PZT陶瓷的Sr掺杂效应对压电致动器驱动压电变压器增益和效率的应用测试
机译:基于陶瓷PZT的压电MEMS扬声器
机译:用于压电MEMS机械能收集的PZT薄膜。
机译:基于计算机化方法的PZT压电陶瓷传感器对听觉生命体征的设计考虑
机译:基于PZT薄膜阵列的基于MEMS的压电悬臂,可从低频振动中收集能量
机译:基于锆钛酸铅(pZT)薄膜的压电mEms麦克风