Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu, TAIWAN;
Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu, TAIWAN;
Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu, TAIWAN;
Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu, TAIWAN;
Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu, TAIWAN;
Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu, TAIWAN;
Tactile sensors; Electrodes; Force; Capacitance; Sensitivity; Polymers;
机译:通过多物理场仿真为集成CMOS-MEMS技术设计的电容式CMOS-MEMS传感器
机译:用于抑制生物应用中CMOS-MEMS电容式力传感器的垂直干扰的静电执行器的设计
机译:采用CMOS-MEMS技术的垂直一体化加热器MOS型气体传感器的设计与制作
机译:垂直集成的多电极设计,用于CMOS-MEMS电容触觉传感器的灵敏度增强
机译:电容式CMOS-MEMS惯性传感器的传感和控制电子设计。
机译:LTCC插入器上具有倒装CMOS的3轴全集成电容式触觉传感器
机译:静电致动器的设计抑制BIO应用中CMOS-MEMS电容式传感器垂直扰动的静电致动器