High Performance Piezoelectric Aln Mems Resonators for Liquid Sensing and Beyond – The Potential of Piezomems

摘要

Piezoelectric MEMS resonators based on advanced aluminum nitride thin films are a promising and versatile technology platform to tackle a multitude of sensory challenges. In this talk, we will give an overview on recent achievements in this field focusing on potential applications for e.g. sensing the viscosity and density of liquids and serving as integrated transducers to push the performance of buckled membranes.