Silicon Nanopillars with ZNO Nanorods by Nanosphere Lithography on a Piezoresistive Microcantilever

摘要

This paper reports on the fabrication of 3D silicon nanopillars (NPLs) modified with ZnO nanorods (NRs) (i.e., ZnO-NRs@Si-NPLs) on a piezoresistive Si microcantilever (MC) for sensing application. A monolayer-colloidal-crystal film of polystyrene (PS) nanoparticles (NPs) was deposited and used as physical mask for cryogenic Si dry etching. Vertically aligned Si-NPLs were selectively etched on the MC backside-surface. In addition, ZnO-NRs were grown in-situ on the Si NPLs using a sputtering/oxidizing and chemical bath deposition two-step method, resulting in a 3D ZnO-NRs@Si-NPLs on the MC backside.