Seismic Recording Using A Mode Localized MEMS Accelerometer

摘要

This paper reports the first demonstration of a mode localized resonant accelerometer (MLRXL) as a seismometer. The prototype sensor demonstrates a noise floor of 4.5μg/√Hz at a defined operating point corresponding to an amplitude ratio of 1.22. The device situated in Cambridge, UK recorded an earthquake of magnitude 3.8 with the epicenter at Grimsby, UK on the 9th of June, 2018. This measurement demonstrates the potential for mode localized MEMS accelerometers to be utilized for seismic applications with comparable performance to existing seismometers, with particular relevance to long-period measurements.