Shape Memory Foil-Based Active Micro Damping for Portable Applications

摘要

Novel damping devices are presented and characterized that make use of energy dissipation due to the one-way shape memory effect in micromachined shape memory alloy (SMA) foil actuators of 30 µm thickness and lateral dimensions a few mm. The design of SMA foil actuators consists of free-standing planar suspensions with bridge, spiral and folded beam design for load control in-plane and out-of-plane. In contrast to SMA wire-based solutions, this new approach is compatible to MEMS batch fabrication technology. Under pulsed loading, a damping capacity of up to 0.92 is achieved, which compares favorably with the best viscoelastic damping concepts.