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An investigation on AlInGaP die crack during LED die attach process

机译:LED芯片贴装过程中AlInGaP芯片裂纹的研究

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摘要

Die crack is a potentially serious issue affecting reliability and performance in Semiconductor industry. As a result, customers, particularly in the automotive industry, are concerned about the consequences of this failure mode and expect zero defect. In view of this an investigation was carried out with a focus to eliminate die crack occurrence in the AlInGaP die used in certain LED packages. Crack are only observed in AlInGaP die, other die such InGaN material system were found not exhibit cracks under similar conditions of design and process. Using a process mapping approach, it was observed that cracks only occur on one particular die attach (DA) equipment model. The lower elastic modulus of GaAs combined with the crystal orientation creates condition where external forces during LED assembly, in particularly in DA process, can exceed the mechanical strength of the die causing cracking. It is known that in situation where a crack does not extend into the epitaxial layer, the die will perform well. This makes it impossible to detect at electrical testing. In a controlled experiment, dice were intentionally subjected to large stresses at DA to induce partial cracks. These LEDs were biased with high current and reverse voltage in cyclic mode to induce further stress and initiate crack propagation. It was found that with further crack propagation, these crack dice we able to be segregated. Combined with correct bond force, which will not mechanically overstress the die during assembly and stress test, shown to eliminate this failure mode in mass production and prevent failure in customer application.
机译:管芯裂纹是一个潜在的严重问题,会影响半导体行业的可靠性和性能。结果,特别是在汽车工业中的客户担心这种故障模式的后果并期望零缺陷。鉴于此,进行了研究以消除在某些LED封装中使用的AlInGaP芯片中的芯片裂纹的发生。仅在AlInGaP芯片中观察到裂纹,而在类似的设计和工艺条件下,其他InGaN材料系统的芯片均未显示裂纹。使用过程映射方法,观察到裂纹仅发生在一种特定的芯片连接(DA)设备模型上。 GaAs的较低弹性模量与晶体取向相结合,从而形成了这样的条件,即LED组装期间(特别是在DA工艺中)的外力可能超过芯片的机械强度,从而导致破裂。众所周知,在裂纹不延伸到外延层的情况下,模具将表现良好。这使得不可能在电气测试中进行检测。在一个对照实验中,故意在DA上对骰子施加较大的应力,以诱发部分裂纹。这些LED以大电流和反向电压以循环模式偏置,以引起进一步的应力并引发裂纹扩展。已经发现,随着裂纹的进一步扩展,我们可以将这些裂纹骰子隔离开。结合正确的结合力(在组装和应力测试期间不会对模具造成机械过大的应力),可以消除批量生产中的这种故障模式并防止客户应用中的故障。

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