Fabrication and characterization of terahertz emitting GaAs/AlGaAs micropillar quantum cascade structures in a double metal waveguide

摘要

We are presenting results from the fabrication and characterization of GaAs/Al0.15Ga0.85As micropillar arrays formed by structuring a terahertz quantum cascade laser heterostructure. The micropillar arrays are arranged in a double metal waveguide for providing electrical contacts and collection of terahertz radiation. The diameters of the micropillars are about one order of magnitude smaller then in typical photonic crystal terahertz lasers [1].