Design of tube inner surface diamond-like carbon films deposition apparatus by vehicle of dielectric barrier discharge

摘要

In this study, we explored a tube inner surface diamond like carbon films deposition apparatus by vehicle of dielectric barrier discharge. The apparatus is simple, easy to be enlarged and no matching problems. The parameters are proposed from the experimental results: the gas gap is about 5 mm, the quartz tube thickness is 2–3 mm, and the pressure is about 300–500 torr. the discharge gases are mixture of methane and hydrogen. Argon (or helium) can be added to the device to enhance the electron energy in the plasma and enhance the film quality.