DC MEMS switches with self-x features: Design, simulation and implementation strategies

摘要

Successful MEMS products depend on device reliability to perform their function. While many MEMS products have been introduced into the mass market, a lot of work is now concentrated on adding functionality and reliability. This paper will layout the idea of the implementation of self-x features in MEMS DC switches to improve these characteristics. It introduces the self-monitoring and self-repairing functions at component level. Special additional structures have been added into the MEMS DC Switch device to give these additional functionality. Our MEMS switches are designed using the MetalMUMPs technology offered by MEMSCAP. Our switch proposal uses lateral switching movement with metal to metal contact, with a gap of 10μm. It is equipped with two moveable structures with electrostatic actuation as primary source of force. Heat actuators are used for self-repairing procedures. Our initial simulation results show an actuation voltage of around 92V for the electrostatic actuation and a resonance frequency of 6.724kHz.