Influence of the Casimir force on the static and dynamic behavior of electrostatically driven micromechanical resonators

摘要

A model to quantify the influence of the Casimir force on electrostatically driven micromechanical resonators is developed and presented. An important parameter, which we call the Casimir parameter, is introduced to qualify this influence. Both the static and dynamic modes of micromechanical resonators are analyzed. Furthermore, the theory has been used on existing designs, and it was found that in some cases the Casimir force already has a minor impact.