Comparison of Roughness Measurements between a Contact Stylus Instrument and an Optical Measurement Device based on a Colour Focus Sensor

摘要

The measurement of the roughness of technical surfaces plays an important role in scientific and industrial applications. Traditionally the roughness has been measured using contact stylus instruments. In contrast to this, we present the optical measurement device InfiniteFocus by Alicona Imaging, which is able to reconstruct 3D models of technical surfaces and allows amongst others to measure their roughness. We demonstrate this using a random micro-roughness standard with known calibrated roughness parameters Ra and Rz.