Silicon MEMS for Photonic Bandgap Devices

摘要

An optical filter is presented based on lateral beam propagation between input and output fibers, through a 1-dimensional silicon photonic bandgap (PBG) structure. Optical modelling of the device shows that a very high degree of verticality is needed for the PBG surfaces, and a fabrication technique is described by which these can be obtained, using a combination of wet and dry silicon etching steps.