Young Modulus Measurement of Nanostructured Palladium Thin Films

摘要

We have uniformly coated cantilever of an Atomic Force Microscope (AFM) with palladium thin films. These films are nanostructured with thickness going from 20.9 up to 111 nm. The resonance frequencies of this cantilever have been measured, before and after the Pd coatings. Taking into account these frequencies and the vibrating beam theory, we determined the Young modulus of the Pd films, obtaining E_2 = 115.1 +- 2.1 GPa, that is about 7 % lower than the respective bulk elastic modulus.