Optimization of Thermally Actuated Bimorph Cantilevers for Maximum Deflection

摘要

The tip displacement of thermally actuated bimorph cantilevers is examined analytically to determine the optimum combination of material properties and structure dimensions to achieve maximum deflection. Two cases are considered: constant combined layer thickness (varying the layer thickness ratio) and constant single layer thickness (varying the second layer thickness). Analytical results are verified by comparison with finite element simulations. Several design optimization examples are presented to illustrate the usefulness of the analytical approach over conventional numerical and simulation methods.