Magnetic Diffusion Modeling In Nonlinear Micro-Media: A Modified Finite-Difference Time-Domain Approach

摘要

As flux densities and frequencies are raised to increase the performance of magnetic actuators, machines, and inductors in the micro-scale, eddy currents and magnetic saturation start to limit the performance of these devices. In this paper, we present a powerful numerical method based on a modified finite-difference time-domain simulation of Maxwell's equations. This method successfully models both eddy currents and material saturation within a magnetic MEMS device. Experimental verification of the method is also presented.