Hierarchical Finite Element Simulation of Perforated Plates with Arbitrary Hole Geometries

摘要

A two-level hierarchical simulation strategy for gas damped microdevices including perforated structures is presented. The first level of hierarchy consists of finding the flow resistance of a single hole using 3D numerical simulation. The second level of hierarchy is the coupled reduced dimensional simulation of the device including mechanical, electrostatic and fluidic phenomena. The method can be used to model time-dependent problems including large displacements. The scheme is applied to the simulation of a membrane with hexagonal perforation in the cases of transient pull-in and damped large-amplitude oscillation.