Nanomachining on Si (100) Surface using an Atomic Force Microscope with a Lateral Force Transducer

摘要

Nanoscale machining on Si surfaces has been performed using an atomic force microscope combined with a two-axis capacitive force/displacement transducer. In scratching on Si (100) surfaces by a diamond tip with a radius of about 50 nm, the minimum normal force where a reproducible groove is generated is about 25 μN. It is possible to produce a nanoscale groove with a depth of 0.2 nm and a width of 20 nm at a normal force of 30 μN. The nanoscale scratch grooves are produced by very complicated processes including rubbing, ploughing, nanoscale-wear, chemical action and so on. In addition, it is demonstrated that the fine letters "UUPE" (a letter with dimensions 600x600x3 nm~3) are successfully written by mechanical scratching.