Low Damping Differential-Capacitive Sensing Comb

摘要

Many researchers have proposed high aspect ratio single crystalline silicon structure to improve sensitivity in capacitive sensing for laterally oscillating MEMS devices. As the height of structure increases, the capacitive sensing area in high aspect ratio structure is linearly increased while the damping force is cubically increased. In the present study, a specially designed capacitive sensing comb is proposed for low damping and high capacitance characteristics. Geometry of sensing comb is modified to decrease the damping force. Simulations and experiments have been performed with focus on geometrical parameters of the sensing comb.