Influence of Scribe Speed and Force on Chemomechanical Nanofunctionalized Features

摘要

Researchers at Brigham Young University have recently developed a new method for preparing monolayer films on silicon surfaces. The method consists of wetting the wafer with a reactive organic liquid, mechanically scribing a feature on the surface of the wafer while it is immersed, and cleaning the surface to remove the organic liquid and any silicon particles that are produced by scribing. The objective of this paper is to present preliminary results on understanding how the scribed features and their performance are affected by the mechanical characteristics of the scribing system. Performance is simply judged here by the amount of water a hydrophobic square (corral) can hold. Testing was performed to determine the influence of tip force and scribing speed on the geometry and performance of the scribed lines. Lower forces produced smoother lines, however the corrals that were formed using a high force were shown to hold the most water.