COST EFFECTIVE AMC CONTROL STRATEGY FOR SEMICONDUCTOR MANUFACTURING

摘要

Airborne molecular contamination (AMC) is an important topic in today's semiconductor fabs, where filtration system investment and operating costs are becoming an increasingly important factor. Different methods of filtering airborne molecular contamination are currently being studied with respect to their efficiency and integration in the air systems of semiconductor fabs as well as the cost-of-ownership. However, the first step towards controlling molecular contamination is prevention. First and foremost this means choosing the materials used for the construction of the cleanroom and the air system very carefully. Different methods for evaluating the outgassing potential of construction materials are compared with respect to the results they produce.rnThe residual contamination from processes, air intake and outgassing found in the cleanroom can then be reduced by chemical filters at different locations in the air system.rnAnother big issue is the monitoring of critical chemical compounds for special process steps in the sub-ppb range. Of key importance here is real-time monitoring to prevent wafer damage at critical concentrations.