Volume control manifold for membrane adaptive optics

摘要

An innovative adaptive optic concept is discussed that provides a dramatically improved dynamic bandwidth over existing approaches. This innovation is associated with membrane adaptive optics such as silicon nitride and polymer based films. This concept utilizes a volume control manifold that is co-located with the electrostatic actuators to dramatically improve total actuator force which in turn improves dynamic bandwidth and stroke. Presented is the result of a laboratory experiment showing time lapse images of a polymer film that is actuated by a single volume control actuator. An important constraint of the concept involves the depth of the air gap between the activated membrane and the backplate which includes both the electrostatic and volume control actuators. This depth is nominally less than 100 μm. At these depths, the viscosity of air becomes an important physical phenomenon.