Spray coating and large gap exposure technology -One of the key processes in the MEMS fabrication

摘要

MEMS devices require high topographic structures. Many of them cause problems for resist process withspin coating technique. Another problem is the high distance for exposure tool which reduce the resolution dramatically.In order to solve these problems, Suss developed spray coating technology and large gap exposureoptics. New development of so called MO (Microlens Optics) exposure Optics makes high resolution insubmicron area with large proximity distance possible.