Catalytic Stamp Lithography for Sub-100 nm Patterning of Organic Monolayers

摘要

Patterning of organic nanostructures1 6 to control surface chemistries on technologically relevant substrates is of wide interest for the realization of molecular-scale engineering, ranging from electronics2 to bioactive interfaces 3 In addition to the traditional photolithographic approach,4 imprint lithography-based techniques can provide a high throughput, large-area, and cost-effective route for this purpose,5a Microcontact printing (aCP), for example, has become a widely used, viable patterning tool to produce organic* micron-scale motifs,5b but challenging problems such as ink diffusion and stamp deformation make sub-100 nm patterning less routine.5a>c>d Catalytic molecular transformations, as demonstrated by scanning probe techniques,6 are promising to this end, and its iCP offshoot has just emerged recently.7 Herein, we describe our approach toward sub-100 nm patterning of organic monolayers through the integration of catalysis and stamping: catalytic stamp lithography.