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首页> 外文期刊>Journal of the American Chemical Society >Oxidized Gold as an Ultrathin Etch Resist Applied in Microcontact Printing
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Oxidized Gold as an Ultrathin Etch Resist Applied in Microcontact Printing

机译:氧化金作为超薄抗蚀剂在微接触印刷中的应用

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摘要

In this report it is described how a gold surface can be treated with an oxygen plasma to become an effective etch mask.The barrier is expected to be less sensitive to defects than traditional self-assembled monolayer (SAM) barriers and,contrary to these conventional barriers,is expected to spontaneously deteriorate in time.Using a novel patterning scheme based upon microcontact printing (mu CP) of a reductant ink,patterns can be created that can be selectively etched (Figure 1).Such a scheme offers advantages similar to those of positive microcontact printing ((+)mu CP).
机译:在此报告中,描述了如何用氧等离子体处理金表面以成为有效的蚀刻掩模。与传统的自组装单层(SAM)阻挡层相比,该阻挡层对缺陷的敏感性较低,并且与这些常规阻挡层相反使用一种基于还原剂墨水的微接触印刷(mu CP)的新颖构图方案,可以创建可以选择性蚀刻的图形(图1)。这种方案具有与那些相似的优点。正微接触印刷((+] mu CP)

著录项

  • 来源
    《Journal of the American Chemical Society》 |2006年第49期|p.15560-15561|共2页
  • 作者单位

    MESA+ Institute for Nanotechnology,MESA+ Strategic Research Orientation "Nanofabrication ",Molecular Nanofabrication,and Solid State Physics,University of Twente,P.O.Box 217,7500 AE Enschede,The Netherlands,and Philips Research,High Tech Campus Eindh;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);美国《化学文摘》(CA);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 化学;
  • 关键词

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